Etch rates for micromachining processing-part II
نویسندگان
چکیده
منابع مشابه
Etch Rates for Micromachining Processing—Part II
Samples of 53 materials that are used or potentially can be used or in the fabrication of microelectromechanical systems and integrated circuits were prepared: single-crystal silicon with two doping levels, polycrystalline silicon with two doping levels, polycrystalline germanium, polycrystalline SiGe, graphite, fused quartz, Pyrex 7740, nine other preparations of silicon dioxide, four preparat...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2003
ISSN: 1057-7157
DOI: 10.1109/jmems.2003.820936